Image formation by use of the geometrical theory of diffraction-Reference-Cited by-同舟云学术

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Image formation by use of the geometrical theory of diffraction

Published:2004-06-01 Issue:6 Volume:21 Page:959
ISSN:1084-7529
Container-title:Journal of the Optical Society of America A
language:en
Short-container-title:J. Opt. Soc. Am. A

Author:

Khoh Andrew,Samudra Ganesh S.,Wu Yihong,Milster Tom,Choi Byoung-Il

Publisher

The Optical Society

Subject

Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Optical proximity correction for intermediate-pitch features using sub-resolution scattering bars

2. Reduction Of Errors Of Microphotographic Reproductions By Optimal Corrections Of Original Masks

3. Geometrical Theory of Diffraction*

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dark field imaging of high aspect ratio structures – a simple model;Optics Express;2023-11-03

2. General expression of the diffracted waves by a half-screen with generalized impedance boundary conditions;Optik;2019-02

3. Uniform asymptotic theory for the edge diffraction of cylindrical waves;IET Microwaves, Antennas & Propagation;2017-10-13

4. Efficient representation of mask transmittance functions for vectorial lithography simulations;Journal of the Optical Society of America A;2014-10-28

5. Optical Proximity Corrections for Digital Micromirror Device-based Maskless Lithography;Journal of the Optical Society of Korea;2012-09-25

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