Development of a laser-scattering-based probe for on-line measurement of surface roughness-Reference-Cited by-同舟云学术

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Development of a laser-scattering-based probe for on-line measurement of surface roughness

Published:2003-03-01 Issue:7 Volume:42 Page:1318
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Wang Shihua,Tian Yunhui,Tay Cho Jui,Quan Chenggen

Publisher

The Optical Society

Reference21 articles.

1. Surface metrology

2. Stylus Contact Method for Surface Metrology in the Ascendancy

3. Recent developments in surface roughness characterization

4. Measurement of surface profiles by the focusing method

5. Whole-field determination of surface roughness by speckle correlation

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