Efficiency of using the compensation method for synthesizing precision angle-measuring structures
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Published:2023-12-01
Issue:12
Volume:90
Page:766
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ISSN:1070-9762
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Container-title:Journal of Optical Technology
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language:en
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Short-container-title:J. Opt. Technol.
Author:
Kiryanov Alexey V.
Publisher
Optica Publishing Group