Sub-50 nm control of light at 405 nm with planar Si nanolens

Abstract

We studied the super-resolution light modulation capability of Si nanodisks, a flat semi-transparent high index nanolens in the visible spectral range. A Laguerre-Gaussian beam-based optimization algorithm was developed to synthesize desired field distributions. Focused spots below 45 nm (< λ/9) were successfully achieved with 405 nm light over the whole center area of the nanolens. This superb light nano-focusing capability allows us to synthesize complex nano-patterns by simply superposing several focus spots together, making the Si nanolens a promising tool for super-resolution photolithography.