Chromatic confocal measurement method using a phase Fresnel zone plate

Abstract

A chromatic confocal measurement method based on a phase Fresnel zone plate (FZP) is described. Strong dispersion of FZP results in significant axial focal shift. The axial dispersion curve is close to linear within a certain wavelength range determined by the quantitative calculation using the vectorial angular spectrum theory. A 11.27 mm diameter phase FZP with a primary focal length of 50 mm was processed using standard photolithography technology and used as the dispersive objective in a homemade chromatic confocal measurement system. The calibrated axial measurement range exceeds 16 mm, the axial resolution reaches 0.8 µm, and the measurement accuracy of displacement is better than 0.4%. This chromatic confocal sensor has been practically used in the measurement of step height, glass thickness, and 3D surface profile. The proposed method has the obvious characteristics of simplicity, greatly reduced cost and superior performance. It is believed that this sensing method has broad application prospects in glass, coating, machinery, electronics, optics and other industries.