Affiliation:
1. Technology and Innovation Centre
Abstract
The heterogeneous integration of pre-fabricated lithium niobate
photonic waveguide devices onto a silicon nitride waveguide platform
via a transfer-printing approach has been demonstrated for the first
time. A fabrication process was developed to make free-standing
lithium niobate membrane devices compatible with back-end integration
onto photonic integrated circuits. Micro-ring resonators in membrane
format were lithographically defined by using laser direct writing and
plasma dry etching. The lithium niobate micro-ring resonators were
then transferred from their host substrate and released onto a silicon
nitride waveguide chip. An all-pass ring resonator transmission
spectrum was obtained in the 1.5 µm to
1.6 µm wavelength range, with a measured loaded Q-factor
larger than 3.2 × 104.
Funder
Engineering and Physical Sciences
Research Council
Innovate UK
Royal Academy of
Engineering
Subject
Electronic, Optical and Magnetic Materials
Cited by
12 articles.
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