Development of an X-ray imaging detector to resolve 200 nm line-and-space patterns by using transparent ceramics layers bonded by solid-state diffusion-Reference-Cited by-同舟云学术

Development of an X-ray imaging detector to resolve 200 nm line-and-space patterns by using transparent ceramics layers bonded by solid-state diffusion

Published:2019-03-12 Issue:6 Volume:44 Page:1403
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Kameshima Takashi,Takeuchi Akihisa,Uesugi Kentaro,Kudo Togo,Kohmura Yoshiki,Tamasaku Kenji,Muramatsu Katsuhiro,Yanagitani Takagimi,Yabashi Makina,Hatsui Takaki

Funder

Japan Society for the Promotion of Science

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference16 articles.

1. X-ray imaging with submicrometer resolution employing transparent luminescent screens

2. Charge-coupled device area x-ray detectors

3. Development of submicrometer resolution x-ray CT system at SPring-8

4. High-resolution application of YAG:Ce and LuAG:Ce imaging detectors with a CCD X-ray camera

5. Single crystal scintillator plates used for light weight material X-ray radiography

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