Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry
Author:
Funder
National Science Council of the Republic of Taiwan
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Measurement technologies for precision positioning
2. High-accuracy translation–rotation encoder with two gratings in a Littrow mount
3. Heterodyne Wollaston laser encoder for measurement of in-plane displacement
4. Displacement measurement using a wavelength-phase-shifting grating interferometer
5. Common-path laser planar encoder
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