Author:
Senichev Alexander,Martin Zachariah O.,Wang Yongqiang,Htoon Han,Lagutchev Alexei S.,Boltasseva Alexandra,Shalaev Vladimir M.
Abstract
We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.