Visual encoder-based angle measurement method in low-frequency angular vibration calibration

Author:

Cheng Hao1,Wang Ying23ORCID,Wei Kai4,Liu Zhihua1,Yang Ming5,Cai Chenguang1

Affiliation:

1. National Institute of Metrology

2. Institute of Microelectronics of the Chinese Academy of Sciences

3. University of Chinese Academy of Sciences

4. Qingdao Institute of Measurement Technology

5. Guizhou University

Abstract

Angular vibration calibration is required to determine the sensitivity of sensors such as dynamic inclinometers, gyroscopes, and angular accelerometers, which are used for angular motion measurement in engineering applications. Additionally, the calibration performance depends on the accuracy of the angle measurement by laser interferometry or a circular grating (CG) method that is commonly used in vibration calibration. However, these methods usually own a complex and high-cost system or limited frequency and amplitude ranges. In this study, a novel, to the best of our knowledge, angle measurement method that combines a special visual encoder and an accurate angular position detection method is investigated; the method requires only a simple and flexible telecentric vision measurement system. Comparison experiments with the CG method demonstrate that the investigated method has the maximum measurement deviation of 0.0014° and 0.0138° for static angle measurement in the small-angle range and continuous full circle, respectively. The relative deviation of the angular vibration measurement in the range of 0.1–8 Hz with amplitudes 0–100° is less than 0.173%. Additionally, the relative deviation of calibrated sensitivity of a gyroscope by the investigated and CG methods is less than 0.096%.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Doctor Foundation Project of Guizhou University

Youth Science and Technology Talents Development Project of Guizhou Education Departmentent

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

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