Affiliation:
1. National Institute of Metrology
2. Institute of Microelectronics of the Chinese Academy of Sciences
3. University of Chinese Academy of Sciences
4. Qingdao Institute of Measurement Technology
5. Guizhou University
Abstract
Angular vibration calibration is required to determine the sensitivity of sensors such
as dynamic inclinometers, gyroscopes, and angular accelerometers,
which are used for angular motion measurement in engineering
applications. Additionally, the calibration performance depends on the
accuracy of the angle measurement by laser interferometry or a
circular grating (CG) method that is commonly used in vibration
calibration. However, these methods usually own a complex and
high-cost system or limited frequency and amplitude ranges. In this
study, a novel, to the best of our knowledge, angle measurement method
that combines a special visual encoder and an accurate angular
position detection method is investigated; the method requires only a
simple and flexible telecentric vision measurement system. Comparison
experiments with the CG method demonstrate that the investigated
method has the maximum measurement deviation of 0.0014° and 0.0138°
for static angle measurement in the small-angle range and continuous
full circle, respectively. The relative deviation of the angular
vibration measurement in the range of 0.1–8 Hz with amplitudes 0–100°
is less than 0.173%. Additionally, the relative deviation of
calibrated sensitivity of a gyroscope by the investigated and CG
methods is less than 0.096%.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Doctor Foundation Project of Guizhou University
Youth Science and Technology Talents Development Project of Guizhou Education Departmentent
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
1 articles.
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