Abstract
An amorphous germanium-tin (a-Ge0.83Sn0.17) waveguide bolometer featuring a one-dimension (1D) metasurface absorber is proposed for mid-infrared photodetection at room-temperature. The device is based on the germanium-on-silicon (GOS) photonic platform. The impacts of the 1D metasurface on the performances of the waveguide bolometer are investigated. The responsivity of the a-Ge0.83Sn0.17 waveguide bolometer could be significantly enhanced by the metasurface. A responsivity of around −3.17%/µW within the 4.1 ∼ 4.3 µm wavelength range is achieved. In addition, a 3-dB roll-off frequency higher than 10 kHz is obtained.
Funder
Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology
Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle
National Natural Science Foundation of China
National Key Laboratory of Infrared Detection Technologies
Subject
Atomic and Molecular Physics, and Optics