Non-coplanar misalignment optical waveguide cantilever sensor with a monotonic response in a large operation range
Author:
Affiliation:
1. Poly Microchip Technology Co. Ltd.
2. Institute of Microelectronics of the Chinese Academy of Sciences
3. Shanghai Institute of Measurement and Testing Technology
Abstract
Funder
Fundamental Research Funds for the Central Universities
National Key Research and Development Program of China
Publisher
Optica Publishing Group
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference20 articles.
1. Cantilever-like micromechanical sensors
2. Nanomechanical cantilever array sensors;LangBhushan,2007
3. Cantilever-based sensing: the origin of surface stress and optimization strategies
4. Micro/Nano fabricated cantilever based biosensor platform: A review and recent progress
5. Challenges for nanomechanical sensors in biological detection
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