Wafer-level hermetically sealed silicon photonic MEMS-Reference-Cited by-同舟云学术

Wafer-level hermetically sealed silicon photonic MEMS

Published:2022-01-14 Issue:2 Volume:10 Page:A14
ISSN:2327-9125
Container-title:Photonics Research
language:en
Short-container-title:Photon. Res.

Author:

Jo Gaehun^ORCID,Edinger Pierre^ORCID,Bleiker Simon J.^ORCID,Wang Xiaojing^ORCID,Takabayashi Alain Yuji^ORCID,Sattari Hamed^ORCID,Quack Niels^ORCID,Jezzini Moises,Lee Jun Su,Verheyen Peter,Zand Iman,Khan Umar^ORCID,Bogaerts Wim^ORCID,Stemme Göran^ORCID,Gylfason Kristinn B.^ORCID,Niklaus Frank^ORCID

Funder

H2020 Industrial Leadership

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference37 articles.

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5. 300-mm Monolithic Silicon Photonics Foundry Technology

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