Miniature GaN optoelectronic temperature sensor

Author:

Wang Binju,Fu Kang,Fu Jianwei,Ye Ziqi,Shi Fan,Yan JiabinORCID,Wang YongjinORCID

Abstract

The combination of plastic optical fiber (POF) with monolithically integrated transmitter and receiver is becoming increasingly attractive for the development of miniature optoelectronic sensing systems. Here, we propose a temperature sensing system by integrating a GaN optoelectronic chip with a POF and aluminum (Al) reflector. Owing to the overlap between electroluminescence and responsivity spectra of multiple quantum well (MQW) diodes, both the transmitter and the receiver having identical MQW structures are monolithically integrated on a tiny GaN chip by using the same fabrication process flow. Environmental temperature change leads to thermal deformation in the Al reflector, which reflects the transmitted light back with a light pulse. The reflected light is coupled into the guided POF again and sensed by the on-chip receiver. Finally, the temperature information is read out as electrical signals. When the ambient temperature changes from 20.1°C to 100°C, the optically induced electrical signal decreases from −3.04 µA to −3.13 µA. The results suggest that the monolithically integrated GaN device offers a promising option for optoelectronic temperature sensing systems.

Funder

National Natural Science Foundation of China

111 Project

National Key Research and Development Program of China

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. GaN Optical Devices Integrated With Sol-Gel Films for pH Detection;IEEE Transactions on Electron Devices;2024-02

2. Monolithic III-Nitride Photonic Circuit for Integrated Sensing and Communication System;2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS);2023-11-27

3. Design of High Precision Temperature Sensor with Current Gain Compensation Technology for On-Chip Application;Journal of Nanoelectronics and Optoelectronics;2023-07-01

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