Affiliation:
1. Beijing Institute of Technology
2. Zhejiang University
Abstract
The paper proposed and verified a method of object edge detection based on the innovative defect spot working mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, edge-detection sensitivity could be improved. Calibration experiments with the piezoelectric transducer (PZT) and object edge-detection experiments indicate that the object edge-detection sensitivity and accuracy of our method could reach 1 and 20 nm, respectively. Therefore, this method can be widely used in high-precision alignment, geometric parameters measurement, and other fields.
Funder
Henan Provincial Science and Technology Research Project
National Natural Science Foundation of China
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering