Author:
Min’kov Kirill N.,Shitikov Artem E.,Danilin A. N.,Lobanov Valery E.,Bilenko Igor A.
Abstract
An efficient algorithm for fabrication of high-Q crystalline whispering-gallery-mode optical microcavities using diamond turning and subsequent asymptotic abrasive polishing is developed. This method allows fabrication of microcavities with predefined geometry and Q-factor higher than 107.