Pitch-variable blazed grating consisting of freestanding silicon beams
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Micromechanical Gratings for Visible and Near-Infrared Spectroscopy
2. A review of MEMS external-cavity tunable lasers
3. Reconfigurable Optical Wavelength Multiplexer Using a MEMS Tunable Blazed Grating
4. High-Resolution Electrostatic Analog Tunable Grating With a Single-Mask Fabrication Process
5. Micro-opto-mechanical grating switches
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1. Tunable Fabry–Perot interferometer operated in the terahertz range based on an effective refractive index control using pitch-variable subwavelength gratings;Optics Letters;2024-02-09
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