Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. The origins and the future of microfluidics
2. Control and detection of chemical reactions in microfluidic systems
3. Femtosecond laser-assisted three-dimensional microfabrication in silica
4. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
5. Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching
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