Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source

Published:2014-03-24 Issue:7 Volume:39 Page:1953
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Nowak Krzysztof M.,Ohta Takeshi,Suganuma Takashi,Fujimoto Junichi,Mizoguchi Hakaru,Sumitani Akira,Endo Akira

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference11 articles.

1. Development of Laser-Produced Tin Plasma-Based EUV Light Source Technology for HVM EUV Lithography

2. Laser produced plasma EUV sources for device development and HVM

3. Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier

4. Short-pulse multiline and multiband energy extraction in high-pressure CO<inf>2</inf>-laser amplifiers

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

2. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

3. QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source;SPIE Proceedings;2017-01-13

4. Update of EUV Source Development Status for HVM Lithography;Journal of Laser Micro/Nanoengineering;2016-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP