Widefield Heterodyne Optical Coherence Microscopy for Volumetric Vibration Imaging

Abstract

We propose a method for simultaneous tomographic vibration visualization of an entire volume of a target object using a scanning low-coherence interferometric microscope. By combining the difference frequency component produced by the phase modulated reference beam and the object vibration into the time-domain OCT signal, we could capture the internal vibration distribution at a frequency of 43 kHz, which far exceeds the frame rate of the CMOS image sensor as a detector, with 25 nm sensitivity.