Phase Sensitive Surface Profile Measurement Using Swept Multigigahertz Supercontinuum Comb

Abstract

A high-speed full-field surface profile measurement technique using frequency tunable supercontinuum multigigaherz comb was proposed. The phase modulation to the reference path of the microscopic interferometer resolved the previous non-measurable problem, and simultaneous detection of two modalities with amplitude and phase was realized. 3D measurements with a scan speed of 865 (depth) × 512 (length) × 640 (width) voxels/s was achieved. The depth resolution was improved to be approximately 30 μm.