Ultra-precise determination of thicknesses and refractive indices of optically thick dispersive materials by dual-comb spectroscopy
Author:
Funder
Japan Society for the Promotion of Science
Core Research for Evolutional Science and Technology
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference43 articles.
1. A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry
2. Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer
3. Measurement of refractive index and thickness of transparent plate by dual-wavelength interference
4. Use of Michelson and Fabry–Perot interferometry for independent determination of the refractive index and physical thickness of wafers
5. High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass
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