Robust design of mid-infrared GaSb-based single-mode laser diode fabricated by standard photolithography with socketed ridge-waveguide modulation

Abstract

In this paper, we put up a robust design of a stable single-mode-operated GaSb-based laser diode emitting around 1950nm. This novel design structure with socketed ridge-waveguide enables a simple fabrication and batch production of mid-infrared laser diodes on account of the mere usage of standard photolithography. By introducing micron-level index perturbations distributed along the ridge waveguide, the threshold gains of different FP modes are modulated. Four geometrical parameters of the perturbations are systematically optimized by analyzing the reflection spectrum to get a robust single-mode characteristic. Based on the optimized geometrical parameters, 1-mm long uncoated lasers are carried out and exhibit a stable single longitudinal mode from 10 °C to 40 °C with a maximum output power of more than 10 mW. Thus, we prove the feasibility of the standard photolithography to manufacture the monolithic single-mode infrared laser source without regrowth process or nanoscale lithography.