High-resolution 3D nanoprinting based on two-step absorption via an integrated fiber-coupled laser diode

Abstract

Three-dimensional (3D) laser nanoprinting with high resolution and low cost is highly desirable for fabricating arbitrary 3D structures with fine feature size. In this work, we use a 405-nm integrated fiber-coupled continuous wave (cw) laser diode to establish an easy-to-build 3D nanoprinting system based on two-step absorption. Two-dimensional (2D) gratings with a sub-150-nm period and 3D woodpile nanostructures with a lateral period of 350 nm have been printed at a low speed. At a faster scan velocity of 1000 µm/s, 2D gratings with sub-200-nm resolution and sub-50-nm linewidth can still be fabricated with laser power less than 1 mW. The two-step absorption of the used benzil initiator enables us to use a second cw laser with 532-nm wavelength to enhance the polymerization with sub-100-nm feature size when starting with insufficient 405-nm laser power, which possess the potential to find applications in high-speed high-resolution parallel-writing and in situ manipulation.