Soft-x-ray projection lithography: printing of 02-μm features using a 20:1 reduction-Reference-Cited by-同舟云学术

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Soft-x-ray projection lithography: printing of 02-μm features using a 20:1 reduction

Published:1990-05-15 Issue:10 Volume:15 Page:529
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Berreman D. W.,Bruning J. H.,Bjorkholm J. E.,Eichner L.,Freeman R. R.,Jewell T. E.,Mansfield W. M.,MacDowell A. A.,O’Malley M. L.,Raab E. L.,Silfvast W. T.,Szeto L. H.,Tennant D. M.,Waskiewicz W. K.,White D. L.,Windt D. L.,Wood O. R.

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference8 articles.

1. Soft X-ray Images of the Solar Corona with a Normal-Incidence Cassegrain Multilayer Telescope

2. Imaging of laser-produced plasmas at 44 Å using a multilayer mirror

3. X‐ray imaging of nanostructure patterns

4. Soft x-ray reduction lithography using multilayer mirrors

5. Revolution in X-ray optics

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