Analysis of optical propagation characteristics of the ultra-long period grating using RCWA

Abstract

There have been significant research and analyses on the diffraction efficiency and characteristics of spectral grating with a wavelength-scale period. However, thus far an analysis on a diffraction grating with an ultra-long pitch over several hundred times of the wavelength (>100µm) and a very deep groove over dozens of micrometers has not been performed. We analyzed the diffraction efficiency of these gratings by using the rigorous coupled-wave analysis (RCWA) method and confirmed that the RCWA analytic results correspond well to the actual experimental results on the wide-angle beam-spreading phenomenon. In addition, because a long-period grating with a deep groove results in a small diffraction angle with relatively uniform efficiency, it is possible to convert a point-like distribution to a linear distribution for a short working distance and a discrete distribution for a very long working distance. We believe that a wide-angle line laser with a long grating period can be used in various applications, such as level detectors, precision measurements, multi-point light detecting and ranging (LiDAR) light sources, and security systems.