Affiliation:
1. Harbin Engineering University
2. The 49th Research Institute of China Electronics Technology Group Corporation
3. Ministry of Education, Tianjin University
Abstract
In this paper, an all-sapphire fiber-optic Fabry-Perot (F-P) pressure sensor is proposed. The sapphire pressure-sensitive diaphragm with low surface roughness is fabricated by MEMS wet etching. The direct bonding process is adopted to bond the sapphire-sensitive diaphragm and substrate together. And the sapphire fiber is adopted to be the lead-in fiber to ensure the sensor’s resistance to high temperature. The performance of the sensor is tested within a pressure range of 0.1
∼
5 MPa and within the temperature range from room temperature to 1200°C. Experimental results show that the sensor could work stably at the temperature of 1200°C. The pressure sensitivity reaches up to 15nm/MPa. The nonlinearity of the sensor is 0.96% FS (full scale), and the relative resolution reaches 0.12%FS. The all-sapphire F-P sensor could be used for high-pressure testing in a high-temperature environment.
Funder
National Natural Science Foundation of China
Postdoctoral Science Foundation of Guangxi Province of China
Heilongjiang Postdoctoral Financial Assistance
Fundamental Research Funds for the Central Universities
Open Project of Key Laboratory of Opto-electronics Information Technology
Subject
Atomic and Molecular Physics, and Optics
Cited by
11 articles.
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