Micro/nano scale amorphization of silicon by femtosecond laser irradiation
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference25 articles.
1. Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method
2. High repetition rate femtosecond laser nano-machining of thin films
3. Direct writing of photomask by ultrashort laser
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5. Multielectron beam blanking aperture array system SYNAPSE-2000
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