Extension of a fifth-order intrinsic aberration for a soft x-ray and vacuum ultraviolet optical system from a one- to two-dimension field light source

Abstract

Based on the fifth-order intrinsic aberration of a soft x-ray and vacuum ultraviolet (XUV) optical system with a one-dimension field light source, it is extended to the case of two-dimension in this paper, and the corresponding aberration calculation method is studied. Firstly, we derived sixth-order intrinsic wave aberration expressions of these kinds of optical systems with the aperture-ray coordinates on the reference exit wavefront; and then, derived the calculation expressions for fifth-order intrinsic aberration on the image plane caused by the contributions of wave aberration and defocus, respectively. Finally, the aberration expressions derived in this paper are applied to calculate the aberration distributions of two design examples of these kinds of optical systems, and these calculation results are compared with the ray-tracing program Shadow to validate the aberration expressions. The study shows that the calculation accuracy of aberration expressions is very satisfactory.