Effects of UV treatment on the properties of ultra-thin indium tin oxide films during growth and after deposition by cavity ring-down spectroscopy

Abstract

In this work, an ultra-sensitive optical absorption technique based on Cavity Ring-Down Spectroscopy (CRDS) was employed to study the effects of UV treatment on the optical properties of ultra-thin indium tin oxide (ITO) films. The ITO films were submitted to UV treatment either after the deposition process or in-situ during the thin-film growth process. Different flow rates of oxygen in the vacuum chamber during film growth were also investigated. An ITO-coated glass substrate inserted in the CRDS cavity at a Brewster’s angle provided a ring-down time of about 1.6 µs, which enabled measurements of optical absorption loss as small as 3 × 10−6. To compare the effects of the UV film treatment, the CRDS technique was employed to measure the extinction coefficient for samples coated with and without the UV treatment. While the optical absorption data was being collected, the electrical resistivity was also simultaneously monitored. The post-deposition UV treatment was found to improve the optical transparency and the electrical performance of ITO film; the optical extinction coefficient of the ultra-thin ITO film is shown to decrease by about 24%. The in-situ UV treatment during growth is also shown to consistently increase the optical transparency of the ultra-thin ITO films and providing outstanding optical performance especially for high flow rates of oxygen during film growth. The electrical resistivity for oxygen flow rates in the range 0.6 - 1.4 sccm is also improved by the in-situ UV treatment, however it shows a sharp increase for oxygen flow rates beyond 1.4 sccm. The CRDS platform is demonstrated here to provide a highly accurate and sensitive methodology for measurement of minute optical absorption losses in ultra-thin films that typically cannot be precisely measured using other conventional spectrophotometric techniques.