Abstract
Highly sensitive and miniaturized accelerometers are of importance in many areas. Herein, an optical micro/nanofiber (MNF) enabled accelerometer is proposed. The structural parameters of the MNF accelerometer are optimized based on theoretical simulation. The accelerometer shows excellent linear relationship between displacement and force in a force range of 0–40 nN and achieves a minimum detectable acceleration of 0.15m/s2. For vibration sensing, the natural frequency of the sensor can be as high as 753 Hz; the vibrations of the tuning fork and human arm are recorded with high fidelity.
Funder
Key Research and Development Program of Zhejiang Province
National Natural Science Foundation of China