Curved GaAs cantilever waveguides for the vertical coupling to photonic integrated circuits

Abstract

We report the nanofabrication and characterization of optical spot-size converter couplers based on curved GaAs cantilever waveguides. Using the stress mismatch between the GaAs substrate and deposited Cr-Ni-Au strips, single-mode waveguides can be bent out-of-plane in a controllable manner. A stable and vertical orientation of the out-coupler is achieved by locking the spot-size converter at a fixed 90∘ angle via short-range forces. The optical transmission is characterized as a function of temperature and polarization, resulting in a broad-band chip-to-fiber coupling extending over 150 nm wavelength bandwidth at cryogenic temperatures, with the lower bound for the coupling efficiency into the TE mode being 16±2% in the interval 900-1050 nm. The methods reported here are fully compatible with quantum photonic integrated circuit technology with quantum dot emitters, and open opportunities to design novel photonic devices with enhanced functionality.