Optical response of rectangular array of elliptical plasmonic particles on glass revealed by Mueller matrix ellipsometry and finite element modeling-Reference-Cited by-同舟云学术

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Optical response of rectangular array of elliptical plasmonic particles on glass revealed by Mueller matrix ellipsometry and finite element modeling

Published:2019-06-17 Issue:7 Volume:36 Page:E78
ISSN:0740-3224
Container-title:Journal of the Optical Society of America B
language:en
Short-container-title:J. Opt. Soc. Am. B

Author:

Walmsness Per Magnus,Brakstad Thomas,Svendsen Brage B.,Banon Jean-Philippe,Walmsley John C.,Kildemo Morten

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Statistical and Nonlinear Physics

Reference33 articles.

1. Modeling ellipsometric measurement of novel 3D structures with RCWA and FEM simulations

2. Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

3. Mueller matrix optical scatterometry of Si fins patterned using directed self-assembly block copolymer line arrays;Dixit,2014

4. Ellipsometric scatterometry for the metrology of sub-01-μm-linewidth structures

5. Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” [Thin Solid Films 455–456 (2004) 828–836]

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1. Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces;Optics Express;2023-12-21

2. Design and analysis of chiral and achiral metasurfaces with the finite element method;Optics Express;2023-12-06

3. True Circular Dichroism in Optically Active Achiral Metasurfaces and Its Relation to Chiral Near-Fields;ACS Applied Optical Materials;2023-07-28

4. Vacuum ultraviolet optical properties of GaSb determined by synchrotron rotating analyzer ellipsometry: applications in nanopillars and plasmonics;Optical Materials Express;2023-04-27

5. Systematic analysis of the Rayleigh–Wood anomalies and the symmetry relations of 2D‐periodic nanostructures by imaging spectroscopic ellipsometry;Applied Research;2023-02-11

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