Model of linewidth for laser writing on a photoresist
Author:
Publisher
The Optical Society
Reference11 articles.
1. Laser Writing of Masks for Integrated Optical Circuits
2. Laser-beam writing system for optical integrated circuits
3. Laser patterning system for integrated optics and storage applications
4. System for laser writing to lithograph masks for integrated optics
5. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
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