Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength
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Publisher
The Optical Society
Reference12 articles.
1. MoRu–Be multilayer-coated grating with 104% normal-incidence efficiency near the 114-nm wavelength
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5. Normal-incidence efficiencies in the 115–340-Å wavelength region of replicas of the Skylab 3600-line/mm grating with multilayer and gold coatings
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