Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter
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Published:2017-05-01
Issue:5
Volume:84
Page:346
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ISSN:1070-9762
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Container-title:Journal of Optical Technology
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language:en
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Short-container-title:J. Opt. Technol.
Author:
Xie Chengke,Chen Ming,Zhu Jing,Yang Baoxi,Huang Huijie
Publisher
The Optical Society
Subject
Applied Mathematics,Computational Mathematics,General Engineering,Atomic and Molecular Physics, and Optics