Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors

Abstract

Higher requirements for monocrystalline silicon x-ray mirrors have been put forward with the development of synchrotron radiation optics. The existing processing technologies limit their efficiency while achieving high-precision manufacturing of x-ray mirrors. Hence, this paper formulates a processing strategy of employing magnetorheological finishing (MRF) to make the precision of x-ray mirrors fully meet the standard. The combination of fine polishing and super-smooth processing can effectively improve the surface quality of mirrors. The residual error, wavefront gradient, and surface roughness of the mirror can reach 7.2 nm, 0.42 µrad, and 0.28 nm, respectively, after several iterations. The research not only indicates that MRF can replace the existing manufacturing method and greatly improve processing efficiency, but also provides technical support for optimizing the processing route of x-ray mirrors.