Proposal and realization of V-groove color tunable µLEDs

Abstract

Color tunable micro light emitting diodes (µLEDs) are proposed and realized, making use of V-grooves to vary the Indium content during growth. The V-grooves make use of semi-polar crystal planes and strain relaxation to provide distinct regions of low to high Indium concentration which are simultaneously integrated. The differing Indium content provides emission from 425 to 640 nm. µLEDs ranging from 2 to 500 µm are demonstrated to showcase the concept.