Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons-Reference-Cited by-同舟云学术

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Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons

Published:2018-01-02 Issue:2 Volume:8 Page:199
ISSN:2159-3930
Container-title:Optical Materials Express
language:en
Short-container-title:Opt. Mater. Express

Author:

Liu Hongchao,Luo Yunfei,Kong Weijie,Liu Kaipeng,Du Wenjuan,Zhao Chengwei,Gao Ping,Zhao Zeyu,Wang Changtao,Pu Mingbo,Luo Xiangang

Funder

973 Program of China

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Interference lithography: a powerful tool for fabricating periodic structures

2. Fabrication of Three-Dimensional Photonic Crystals Using Multibeam Interference Lithography and Electrodeposition

3. Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

4. A Biosensor Based on Metallic Photonic Crystals for the Detection of Specific Bioreactions

5. Extreme sensitivity biosensing platform based on hyperbolic metamaterials

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1. Plasmonic interference lithography based on the second-order diffracted wave of grating and hyperbolic multilayer graphene;Optics Continuum;2024-02-09

2. Flexible and Speedy Preparation of Large-Scale Polystyrene Monolayer through Hemispherical-Depression-Assisted Self-Assembling and Vertical Lifting;ACS Applied Polymer Materials;2023-03-22

3. Pushing feature size down to 11 nm by hyperbolic metamaterials-based interference photolithography under illumination of UV light source;Applied Physics A;2023-01-09

4. Narrow-area average method for measurement of the propagation length of surface plasmon polaritons using nanoslit-grating structures;Results in Physics;2023-01

5. Enhanced Figure of Merit via Hybridized Guided‐Mode Resonances in 2D‐Metallic Photonic Crystal Slabs;Advanced Optical Materials;2022-08-07

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