Monolithic integrated all-GaN-based µLED display by selective area regrowth

Abstract

This work demonstrates an all-GaN-based µLED display with monolithic integrated HEMT and µLED pixels using the selective area regrowth method. The monochrome µLED-HEMT display has a resolution of 20 × 20 and a pixel pitch of 80 µm. With the optimized regrowth pattern, the µLED-HEMT achieves a maximum light output power of 36.2 W/cm2 and a peak EQE of 3.36%, mainly due to the improved crystal quality of regrown µLED. TMAH treatment and Al2O3 surface passivation are also performed to minimize the impact of nonradiative recombination caused by the dry etching damage. With a custom-designed driving circuit board, images of “HKUST” are successfully shown on the µLED-HEMT display.