Vertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry

Author:

Hao Qun,Li Tengfei,Hu Yao,Wang Shaopu,Ning Yan,Tan Yifeng,Zhang Xinmu

Funder

National Key Basic Research Program of China

National Major Scientific Instruments and Equipment Development Project of China

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction;Optics Express;2023-03-30

2. Wavefront optical spacing of freeform surfaces and its measurement using CGH interferometry;Optics and Lasers in Engineering;2023-02

3. Research on the influences of carrier deviation on digital moire interferometric technique;Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022);2023-01-09

4. 光学非球面面形误差和参数误差干涉测量;Acta Optica Sinica;2023

5. Measurement techniques for aspheric surface parameters;Light: Advanced Manufacturing;2023

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