Laser heterodyne interferometric system with following interference units for large X-Y-θ planar motion measurement-Reference-Cited by-同舟云学术

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Laser heterodyne interferometric system with following interference units for large X-Y-θ planar motion measurement

Published:2017-06-07 Issue:12 Volume:25 Page:13684
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Zhang Enzheng,Chen Benyong,Sun Jianjun,Yan Liping,Zhang Shihua

Funder

China Postdoctoral Science Foundation

National Natural Science Foundation of China (NSFC)

Program for Changjiang Scholars and Innovative Research Team in University

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference14 articles.

1. An ultraprecision stage for alignment of wafers in advanced microlithography

2. Non-bar, an optical calibration system for five-axis CNC machine tools

3. Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001)

4. Developments at PTB in nanometrology for support of the semiconductor industry

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