Affiliation:
1. Shenzhen MSU–BIT University
2. Lomonosov Moscow State University
Abstract
The paper presents numerical results of simulations of the deposition process of a complex optical coating using
broadband monitoring of this process in the case when the noise level in the measured transmittance coefficient
has an uneven distribution along the wavelength. The influence on the accuracy of data control at the edges of
the measured wavelength range, where the error in the transmittance coefficient is maximum, is investigated.
It is shown that when a part of the data is removed at the edges of the range, the self-compensation coefficient
of the deposition process errors almost does not change, while the average norm of the error vector of layer
thicknesses significantly decreases. Thus, it is shown for the first time that taking into account the effect of
self-compensation of errors in broadband control opens up the possibility of a reasonable choice of the optimal
spectral range of optical control for practice.
Funder
Russian Science Foundation