Affiliation:
1. Lomonosov Moscow State University. Moscow, Russia
Abstract
The paper presents a comparison of the results of simulating the processes of deposition of optical coatings
using a simplified simulator and a full simulator that takes into account the main error-producing factors
of deposition processes and control of coating layer thicknesses. For the simulators under consideration, the
distributions of error vector norms in the layer thicknesses of coating, layer error correlation coefficients, and
error self-compensation coefficients are calculated. It is shown that the simplified simulator allows one to
obtain adequate results for evaluating the deposition process of real multilayer optical coatings and, thus,
can be used for faster modeling of a large number of coatings with further analysis of their stability against
manufacturing errors.