Nanoscale biosensor with integratedthermoregulation controller for DNA diagnostics.

Abstract

We present a CMOS compatible technique for fabrication a sensor system based on field-effect transistors with a nanowire channel with an integrated thermoregulation elements. The proposed system provides the necessary temperature regimes for many bioanalytical studies. Field-effect transistors with a nanowire channel were fabricated using of reactive-ion etching of the upper layer of a silicon on insulator through a mask formed by electron beam lithography. Titanium thermoresistive strips for temperature control were located on the surface of the chip nearby to the nanowire transistors. Their fabrication is carried out simultaneously with the formation of contact pads to the transistor electrodes, which made it possible to avoid additional technological steps. A demonstration of a system with a built-in temperature controller for the determination of nucleic acids was carried out on model oligonucleotides. Increasing the operating temperature of the device to the ranges at which DNA hybridization occurs most efficiently allows increasing specificity and avoiding false positive results, as well as reducing analysis time. The possibility of heating up to 85–90∘C allows you to reuse such devices.