Affiliation:
1. Lomonosov Moscow State University
Abstract
A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on consideration of individual collisions of clusters with a surface. The amount of substance sputtered from the collision area and the e ciency of its redeposition onto other surface elements are determined. The performance of the model is shown when compared with experimental data. The stages of smoothing of a harmonic relief are studied. A new measure of the e ectiveness of surface smoothing is proposed.
Funder
Russian Science Foundation