Plasma-enhanced atomic-layer-deposited HfO2–SiO2 nanolaminates for broadband antireflection coatings
Author:
Funder
Program of Shanghai Academic Research Leader
National Natural Science Foundation of China
Publisher
Elsevier BV
Reference32 articles.
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4. Sol-gel prepared amorphous Ta2O5 thin film for application in high LIDT antireflection coating and UV photodetection;Pal;Opt. Mater.,2023
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