Author:
Kumar A,Bakhru H,Wang B,Yang G.-R,Fortin J,McDonald J,Lu T.-M
Subject
Condensed Matter Physics,General Materials Science
Reference7 articles.
1. Low-dielectric constant materials for ULSI interlayer dielectric applications, in: W.W. Lee, P.S. Ho (Guest Editors), Materials Research Society Bulletin, Vol. 22, No. 10, 1997, pp. 19–69
2. J.-P. Hirvonen, Handbook of Modern Ion Beam Material Analysis, M. Natasi (Ed.), ch. 7, Materials Research Society, Pittsburgh, 1995
3. Ion beam analysis of fluorine: Its principles and applications
4. Nuclear cross sections for ion beam analysis
5. A. Kumar, H. Bakhru, A.W. Haberl, R.A. Carpio, A. Ricci, Application of Accelerators in Research and Industry, CP392, J.L. Duggan, I.L. Morgan (Eds.), AIP Press, New York (1997)
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献