Studies on water desorption from siloxane spin-on-glass and enhancement in O2 plasma resistance due to ion implantation
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference24 articles.
1. Outgassing behavior of spin-on-glass (SOG)
2. F. Dupuis, W.G. Oldham, Y. Shacham-Diamand, Symp. on VLSI Technology, p. 52, 1985
3. Kinetics and mechanism for desorption of H2O from spin-on-glass
4. Desorption from Spin‐On Glass
5. Process Reliability Considerations of Planarization with Spin‐on‐Glass
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A novel fast and flexible technique of radical kinetic behaviour investigation based on pallet for plasma evaluation structure and numerical analysis;Journal of Physics D: Applied Physics;2013-06-11
2. Inter-metal inorganic spin-on-glass dielectric layer in 100 nm generation technology;Thin Solid Films;2008-10
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