Transient detection in infrared multiphoton decomposition of (chloromethyl)silane and 1,3-disilacyclobutane: evidence for cleavage of SiCH4 intermediates-Reference-Cited by-同舟云学术

Transient detection in infrared multiphoton decomposition of (chloromethyl)silane and 1,3-disilacyclobutane: evidence for cleavage of SiCH4 intermediates

Published:2002-09 Issue:1-3 Volume:152 Page:17-24
ISSN:1010-6030
Container-title:Journal of Photochemistry and Photobiology A: Chemistry
language:en
Short-container-title:Journal of Photochemistry and Photobiology A: Chemistry

Author:

Santos M.,Dı́az L.,Pola J.

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Chemical Engineering,General Chemistry

Reference39 articles.

1. a-SiCx:H films deposited by plasma-enhanced chemical vapor deposition at low temperature used for moisture and corrosion resistant applications

2. Kinetics of silicon carbide CVD: surface decomposition of silacyclobutane and methylsilane

3. INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES

4. Chemical vapor deposition of silicon carbide powders using pulsed CO2Lasers

5. IR laser-induced decomposition of 2-chloroethenylsilane for chemical vapour deposition of Si/C phases

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